Metal Organic Vapour Phase Epitaxy (MOVPE). Low-pressure metal-organic vapor-phase epitaxy reactor with capacity for production of small batches thanks to its 1x4” and 3x2” configurations.
Molecular Beam Epitaxy (MBE)GEN10 System made by Veeco with capacity for 12 wafers without interruption. It counts with a RHEED system to monitor crystal growth and with a Bandit for temperature control during growth.
